Stainless Steel Surface Analysis
Both Auger and XPS (ESCA) methods of stainless steel analysis via Material Interface procedures or SEMI* and Sematech** specifications are provided. When combined with argon depth profiling, concentration as a function of depth is obtained.
 The left figure shows the concentration as a function of depth of O, Cr, and Fe of mechanically polished 316L; the right figure illustrates the effect of passivation on the near-surface Cr/Fe ratio.
Oxidation of stainless steel, commonly called rouging in the pharmaceutical industry, can be studied with Auger electron spectroscopy and x-ray diffraction as illustrated in the images below.
 Auger images of Cr and Fe on 316L stainless steel tubing with rouging phenomenon and x-ray diffraction for verification of Fe2O3 crystals.
* Semiconductor Equipment and Materials International (SEMI®), 3081 Zanker Road, San Jose, CA 95134, USA, Standards F72-1102 (Auger), F60-0306 (XPS), and F 73-1102 (SEM). **Sematech, 2706 Montopolis Drive, Austin, TX 78741, Specifications 90120403B-STD (XPS) and 91060573B-STD (Auger).
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